Introduction to microelectromechanical microwave systems /

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Annotation The second edition covers the latest in fabrication technologies, actuation mechanisms, packaging, switching, resonator design, and microwave and wireless applications. This practical book steers readers past the drawbacks and towards the benefits of integrating RF/microwave MEMS into com...

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Bibliographic Details
Call Number:Libro Electrónico
Main Author: Santos, Héctor J. de los
Format: Electronic eBook
Language:Inglés
Published: Boston : Artech House, ©2004.
Edition:2nd ed.
Series:Artech House MEMS and sensors library.
Microelectromechanical systems series.
Subjects:
Microwave devices.
Microelectromechanical systems.
Micro-Electrical-Mechanical Systems
Dispositifs à micro-ondes.
Microsystèmes électromécaniques.
TECHNOLOGY & ENGINEERING > Microwaves.
Microelectromechanical systems
Microwave devices
Online Access:Texto completo
Table of Contents:
  • Introduction to Microelectromechanical Microwave Systems; Contents; Preface xi; Acknowledgments xxi; 1 Microelectromechanical Systems 1; 2 Fundamental MEMS Device Physics 25; 3 Fundamental MEMS Devices: The MEM Switch 59; 4 Fundamental MEMS Devices: The MEM Resonator 87; 5 Microwave MEMS Applications 121; 6 MEMS-Based Microwave Circuits and Systems 173; Glossary 209; About the Author 211; Index 213

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