Microsystems Dynamics

In recent years microelectromechanical systems (MEMS) have emerged as a new technology with enormous application potential. MEMS manufacturing techniques are essentially the same as those used in the semiconductor industry, therefore they can be produced in large quantities at low cost. The added be...

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Detalles Bibliográficos
Clasificación:Libro Electrónico
Autores principales: Ostasevicius, Vytautas (Autor), Dauksevicius, Rolanas (Autor)
Autor Corporativo: SpringerLink (Online service)
Formato: Electrónico eBook
Idioma:Inglés
Publicado: Dordrecht : Springer Netherlands : Imprint: Springer, 2011.
Edición:1st ed. 2011.
Colección:Intelligent Systems, Control and Automation: Science and Engineering, 44
Temas:
Microtechnology.
Microelectromechanical systems.
Engineering design.
Mechanics, Applied.
Solids.
Computational intelligence.
Microsystems and MEMS.
Engineering Design.
Solid Mechanics.
Computational Intelligence.
Acceso en línea:Texto Completo
Tabla de Contenidos:
  • Foreword
  • Preface
  • Introduction to Microsystems
  • Fabrication Technologies of Microsystems
  • Overview
  • Nickel Surface Micromachining Technology for Fabrication of Microswitches
  • UV Lithography for Fabrication of Micromotors
  • Common MEMS Actuators
  • Parallel Plate Capacitors
  • Comb Drives
  • Electrostatic Micromotors
  • Electrostatic Microswitches
  • Theoretical Background of Multiphysical Interactions Common in Microsystems
  • Introduction to Coupled-Field Modeling
  • Electrostatic Actuation and Pull-in Instability
  • Viscous Air Damping
  • Vibro-Impact Interactions
  • Experimental Testing of Microsystem Dynamics
  • Vibration Excitation Methods
  • Optical Techniques for Measurement of Vibrations of Microstructures
  • Study of Elastic Vibro-Impact Macrosystems and Microsystems
  • Overview of Important New Effects of Nonlinear Dynamics in Vibro-Impact
  • Macrosystems
  • Analysis of Coupled-Field Dynamics in Contact-Type Electrostatic Microactuator
  • Numerical Modeling and Analysis of Fluidic-Structural Interaction
  • Numerical Modeling and Analysis of Electrostatic-Structural Interaction
  • Numerical Modeling and Analysis of Vibro-Impact Interaction
  • Numerical Analysis of the Micromotor
  • Finite Element Modeling of Micromotor
  • Modal Analysis
  • Micromotor Control
  • Analytical Model of a Micromotor
  • Basics of Micromotor Geometry
  • Torque Analysis
  • Micromotor Design Guidelines
  • References.

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