High Permittivity Gate Dielectric Materials

"The book comprehensively covers all the current and the emerging areas of the physics and the technology of high permittivity gate dielectric materials, including, topics such as MOSFET basics and characteristics, hafnium-based gate dielectric materials, Hf-based gate dielectric processing, me...

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Detalles Bibliográficos
Clasificación:Libro Electrónico
Autor Corporativo: SpringerLink (Online service)
Otros Autores: Kar, Samares (Editor )
Formato: Electrónico eBook
Idioma:Inglés
Publicado: Berlin, Heidelberg : Springer Berlin Heidelberg : Imprint: Springer, 2013.
Edición:1st ed. 2013.
Colección:Springer Series in Advanced Microelectronics, 43
Temas:
Electronics.
Optical materials.
Condensed matter.
Spectrum analysis.
Engineering.
Electronics and Microelectronics, Instrumentation.
Optical Materials.
Condensed Matter Physics.
Spectroscopy.
Technology and Engineering.
Acceso en línea:Texto Completo
Tabla de Contenidos:
  • Historical Perspectives
  • High Mobility Channels
  • Non-Volatile Memory
  • Hafnium-Based Gate Dielectric Materials
  • Lanthanum-Based High-K Gate Dielectric Materials
  • Crystalline High-K Gate Dielectric Materials
  • High-K Gate Dielectric Processing.- Metal Gate Electrodes
  • Flat-Band/Threshold Voltage Control
  • Interfaces and Defects
  • Electrical Characterization and Parameter Extraction
  • Non-Contact Metrology of High-K Gate Dielectrics
  • Channel Mobility
  • High-K Gate Dielectric Reliability Issues
  • Bias Temperature Instability
  • Integration Issues.  .

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