Multilayer Integrated Film Bulk Acoustic Resonators

Multilayer Integrated Film Bulk Acoustic Resonators mainly introduces the theory, design, fabrication technology and application of a recently developed new type of device, multilayer integrated film bulk acoustic resonators, at the micro and nano scale involving microelectronic devices, integrated...

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Détails bibliographiques
Cote:Libro Electrónico
Auteurs principaux: Zhang, Yafei (Auteur), Chen, Da (Auteur)
Collectivité auteur: SpringerLink (Online service)
Format: Électronique eBook
Langue:Inglés
Publié: Berlin, Heidelberg : Springer Berlin Heidelberg : Imprint: Springer, 2013.
Édition:1st ed. 2013.
Sujets:
Microtechnology.
Microelectromechanical systems.
Surfaces (Technology).
Thin films.
Condensed matter.
Microsystems and MEMS.
Surfaces, Interfaces and Thin Film.
Condensed Matter Physics.
Accès en ligne:Texto Completo

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