MEMS: A Practical Guide of Design, Analysis, and Applications

MEMS are rapidly moving from the research laboratory to the mar­ ketplace. Many market studies indicate not only a tremendous market potential of MEMS devices; year by year we see the actual market grow as the technology matures. In fact, these days, many large silicon foundries have a MEMS group ex...

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Bibliographic Details
Call Number:Libro Electrónico
Main Authors: Korvink, Jan (Author), Paul, Oliver (Author)
Corporate Author: SpringerLink (Online service)
Format: Electronic eBook
Language:Inglés
Published: Berlin, Heidelberg : Springer Berlin Heidelberg : Imprint: Springer, 2006.
Edition:1st ed. 2006.
Subjects:
Electronics.
Optical materials.
Nanotechnology.
Telecommunication.
Electronics and Microelectronics, Instrumentation.
Optical Materials.
Microwaves, RF Engineering and Optical Communications.
Online Access:Texto Completo
Table of Contents:
  • Microtransducer Operation
  • Material Properties: Measurement and Data
  • MEMS and NEMS Simulation
  • System-Level Simulation of Microsystems
  • Thermal-Based Microsensors
  • Photon Detectors
  • Free-Space Optical MEMS
  • Integrated Micro-Optics
  • Microsensors for Magnetic Fields
  • Mechanical Microsensors
  • Semiconductor-Based Chemical Microsensors
  • Microfluidics
  • Biomedical Systems
  • Microactuators
  • Micromachining Technology
  • LIGA Technology for R&D and Industrial Applications
  • 17 Interface Circuitry and Microsystems.

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