Nanopositioning Technologies Fundamentals and Applications /

This book covers the state-of-the-art technologies for positioning with nanometer resolutions and accuracies, particularly those based on piezoelectric actuators and MEMS actuators. The latest advances are described, including the design of nanopositioning devices, sensing and actuation technologies...

Description complète

Détails bibliographiques
Cote:Libro Electrónico
Collectivité auteur: SpringerLink (Online service)
Autres auteurs: Ru, Changhai (Éditeur intellectuel), Liu, Xinyu (Éditeur intellectuel), Sun, Yu (Éditeur intellectuel)
Format: Électronique eBook
Langue:Inglés
Publié: Cham : Springer International Publishing : Imprint: Springer, 2016.
Édition:1st ed. 2016.
Sujets:
Microtechnology.
Microelectromechanical systems.
Electronics.
Control engineering.
Robotics.
Automation.
Engineering design.
Microsystems and MEMS.
Electronics and Microelectronics, Instrumentation.
Control, Robotics, Automation.
Engineering Design.
Accès en ligne:Texto Completo
Table des matières:
  • 1.A review of Stick-Slip Nanopositioning Actuators
  • 2. Piezoelectric Motor Technology - A Review
  • 3.Design of High-speed Nanopositioning Systems
  • 4.Parallel-Kinematic Nanopositioning Stages Based on Roberts Mechanism
  • 5.Electro-magnetic Nano Positioning
  • 6.Modeling of piezoelectric-actuated nanopositioning stages involving with the hysteresis
  • 7. Tracking Control for Nanopositioning
  • 8.Position Sensors for Nanopositioning
  • 9. MEMS Nanopositioners
  • 10.Control Issues of MEMS nanopositioning devices
  • 11. A Review of Nanomanipulation in Scanning Electron Microscopes
  • 12. Nanopositioning for lithography and data storage.

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