Nanopositioning Technologies Fundamentals and Applications /

This book covers the state-of-the-art technologies for positioning with nanometer resolutions and accuracies, particularly those based on piezoelectric actuators and MEMS actuators. The latest advances are described, including the design of nanopositioning devices, sensing and actuation technologies...

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Bibliographic Details
Call Number:Libro Electrónico
Corporate Author: SpringerLink (Online service)
Other Authors: Ru, Changhai (Editor), Liu, Xinyu (Editor), Sun, Yu (Editor)
Format: Electronic eBook
Language:Inglés
Published: Cham : Springer International Publishing : Imprint: Springer, 2016.
Edition:1st ed. 2016.
Subjects:
Microtechnology.
Microelectromechanical systems.
Electronics.
Control engineering.
Robotics.
Automation.
Engineering design.
Microsystems and MEMS.
Electronics and Microelectronics, Instrumentation.
Control, Robotics, Automation.
Engineering Design.
Online Access:Texto Completo
Table of Contents:
  • 1.A review of Stick-Slip Nanopositioning Actuators
  • 2. Piezoelectric Motor Technology - A Review
  • 3.Design of High-speed Nanopositioning Systems
  • 4.Parallel-Kinematic Nanopositioning Stages Based on Roberts Mechanism
  • 5.Electro-magnetic Nano Positioning
  • 6.Modeling of piezoelectric-actuated nanopositioning stages involving with the hysteresis
  • 7. Tracking Control for Nanopositioning
  • 8.Position Sensors for Nanopositioning
  • 9. MEMS Nanopositioners
  • 10.Control Issues of MEMS nanopositioning devices
  • 11. A Review of Nanomanipulation in Scanning Electron Microscopes
  • 12. Nanopositioning for lithography and data storage.

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