Precision Motion Control Design and Implementation /

Applications of precision engineering, generally defined as manufacturing to tolerances that are better than one part in 105, abound and can be found in various semiconductor processes (e.g., lithography, wafer probing, inspection), co-ordinate measuring machines, precision metrology systems (e.g.,...

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Bibliographic Details
Call Number:Libro Electrónico
Main Authors: Tan, Kok Kiong (Author), Lee, Tong Heng (Author), Huang, Sunan (Author)
Corporate Author: SpringerLink (Online service)
Format: Electronic eBook
Language:Inglés
Published: London : Springer London : Imprint: Springer, 2008.
Edition:2nd ed. 2008.
Series:Advances in Industrial Control,
Subjects:
Control engineering.
Nanotechnology.
Manufactures.
Robotics.
Automation.
Multibody systems.
Vibration.
Mechanics, Applied.
Electronics.
Control and Systems Theory.
Machines, Tools, Processes.
Control, Robotics, Automation.
Multibody Systems and Mechanical Vibrations.
Electronics and Microelectronics, Instrumentation.
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