Precision Motion Control Design and Implementation /
Applications of precision engineering, generally defined as manufacturing to tolerances that are better than one part in 105, abound and can be found in various semiconductor processes (e.g., lithography, wafer probing, inspection), co-ordinate measuring machines, precision metrology systems (e.g.,...
Call Number: | Libro Electrónico |
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Main Authors: | , , |
Corporate Author: | |
Format: | Electronic eBook |
Language: | Inglés |
Published: |
London :
Springer London : Imprint: Springer,
2008.
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Edition: | 2nd ed. 2008. |
Series: | Advances in Industrial Control,
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Subjects: | |
Online Access: | Texto Completo |
Table of Contents:
- Precision Tracking Motion Control
- Automatic Tuning of Control Parameters
- Co-ordinated Motion Control of Gantry Systems
- Geometrical Error Compensation
- Electronic Interpolation Errors
- Vibration Monitoring and Control
- Other Engineering Aspects.