Microelectronic Test Structures for CMOS Technology

Microelectronic Test Structures for CMOS Technology and Products addresses the basic concepts of the design of test structures for incorporation within test-vehicles, scribe-lines, and CMOS products. The role of test structures in the development and monitoring of CMOS technologies and products has...

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Bibliographic Details
Call Number:Libro Electrónico
Main Authors: Bhushan, Manjul (Author), Ketchen, Mark B. (Author)
Corporate Author: SpringerLink (Online service)
Format: Electronic eBook
Language:Inglés
Published: New York, NY : Springer New York : Imprint: Springer, 2011.
Edition:1st ed. 2011.
Subjects:
Electronics.
Optical materials.
Electronic circuits.
Electronics and Microelectronics, Instrumentation.
Optical Materials.
Electronic Circuits and Systems.
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