Materials Fundamentals of Gate Dielectrics

This book presents materials fundamentals of novel gate dielectrics that are being introduced into semiconductor manufacturing to ensure the continuous scalling of the CMOS devices. This is a very fast evolving field of research so we choose to focus on the basic understanding of the structure, ther...

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Bibliographic Details
Call Number:Libro Electrónico
Corporate Author: SpringerLink (Online service)
Other Authors: Demkov, Alexander A. (Editor), Navrotsky, Alexandra (Editor)
Format: Electronic eBook
Language:Inglés
Published: Dordrecht : Springer Netherlands : Imprint: Springer, 2005.
Edition:1st ed. 2005.
Subjects:
Physics.
Astronomy.
Physical chemistry.
Optical materials.
Electrical engineering.
Physics and Astronomy.
Physical Chemistry.
Optical Materials.
Electrical and Electronic Engineering.
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