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Silicon Devices and Process Integration Deep Submicron and Nano-Scale Technologies /

Silicon Devices and Process Integration is compiled from industrial and academic lecture notes and reflects years of experience in the development of silicon devices. It is prepared specifically for engineers and scientists in semiconductor research, development and manufacturing. It is also suitabl...

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Bibliographic Details
Call Number:Libro Electrónico
Main Author: El-Kareh, Badih (Author)
Corporate Author: SpringerLink (Online service)
Format: Electronic eBook
Language:Inglés
Published: New York, NY : Springer US : Imprint: Springer, 2009.
Edition:1st ed. 2009.
Subjects:
Online Access:Texto Completo