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Mems/Nems (1) Handbook Techniques and Applications Design Methods, (2) Fabrication Techniques, (3) Manufacturing Methods, (4) Sensors and Actuators, (5) Medical Applications and MOEMS /
Micro-Electro Mechanical Systems (MEMS) is the integration of mechanical elements, sensors, actuators, and electronics on a common silicon substrate. While the electronics are fabricated using integrated circuit (IC) process sequences (e.g., CMOS, Bipolar, or BICMOS processes), the micromechanical c...
| Call Number: | Libro Electrónico |
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| Corporate Author: | |
| Other Authors: | |
| Format: | Electronic eBook |
| Language: | Inglés |
| Published: |
New York, NY :
Springer US : Imprint: Springer,
2006.
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| Edition: | 1st ed. 2006. |
| Subjects: | |
| Online Access: | Texto Completo |