Cargando…
Introductory MEMS Fabrication and Applications /
Introductory MEMS: Fabrication and Applications is a practical introduction to MEMS for advanced undergraduate and graduate students. Part I introduces the student to the most commonly used MEMS fabrication techniques as well as the MEMS devices produced using these techniques. Part II focuses on ME...
| Clasificación: | Libro Electrónico |
|---|---|
| Autores principales: | , |
| Autor Corporativo: | |
| Formato: | Electrónico eBook |
| Idioma: | Inglés |
| Publicado: |
New York, NY :
Springer US : Imprint: Springer,
2010.
|
| Edición: | 1st ed. 2010. |
| Temas: | |
| Acceso en línea: | Texto Completo |
MARC
| LEADER | 00000nam a22000005i 4500 | ||
|---|---|---|---|
| 001 | 978-0-387-09511-0 | ||
| 003 | DE-He213 | ||
| 005 | 20220125080624.0 | ||
| 007 | cr nn 008mamaa | ||
| 008 | 100301s2010 xxu| s |||| 0|eng d | ||
| 020 | |a 9780387095110 |9 978-0-387-09511-0 | ||
| 024 | 7 | |a 10.1007/978-0-387-09511-0 |2 doi | |
| 050 | 4 | |a TK7800-8360 | |
| 072 | 7 | |a TJF |2 bicssc | |
| 072 | 7 | |a TEC008000 |2 bisacsh | |
| 072 | 7 | |a TJF |2 thema | |
| 082 | 0 | 4 | |a 621.381 |2 23 |
| 100 | 1 | |a Adams, Thomas M. |e author. |4 aut |4 http://id.loc.gov/vocabulary/relators/aut | |
| 245 | 1 | 0 | |a Introductory MEMS |h [electronic resource] : |b Fabrication and Applications / |c by Thomas M. Adams, Richard A. Layton. |
| 250 | |a 1st ed. 2010. | ||
| 264 | 1 | |a New York, NY : |b Springer US : |b Imprint: Springer, |c 2010. | |
| 300 | |a XVI, 444 p. |b online resource. | ||
| 336 | |a text |b txt |2 rdacontent | ||
| 337 | |a computer |b c |2 rdamedia | ||
| 338 | |a online resource |b cr |2 rdacarrier | ||
| 347 | |a text file |b PDF |2 rda | ||
| 505 | 0 | |a Fabrication -- The substrate and adding material to it -- Creating and transferring patterns#x2014;Photolithography -- Creating structures#x2014;Micromachining -- Solid mechanics -- Applications -- Thinking about modeling -- MEMS transducers#x2014;An overview of how they work -- Piezoresistive transducers -- Capacitive transducers -- Piezoelectric transducers -- Thermal transducers -- to microfluidics -- Laboratories -- Microfabrication laboratories. | |
| 520 | |a Introductory MEMS: Fabrication and Applications is a practical introduction to MEMS for advanced undergraduate and graduate students. Part I introduces the student to the most commonly used MEMS fabrication techniques as well as the MEMS devices produced using these techniques. Part II focuses on MEMS transducers: principles of operation, modeling from first principles, and a detailed look at commercialized MEMS devices, in addition to microfluidics. Multiple field-tested laboratory exercises are included, designed to facilitate student learning about the fundamentals of microfabrication processes. References, suggested reading, review questions, and homework problems are provided at the close of each chapter. Introductory MEMS: Fabrication and Applications is an excellent introduction to the subject, with a tested pedagogical structure and an accessible writing style suitable for students at an advanced undergraduate level across academic disciplines. . | ||
| 650 | 0 | |a Electronics. | |
| 650 | 0 | |a Electronic circuits. | |
| 650 | 0 | |a Mechanics. | |
| 650 | 0 | |a Surfaces (Technology). | |
| 650 | 0 | |a Thin films. | |
| 650 | 0 | |a Mechanics, Applied. | |
| 650 | 0 | |a Solids. | |
| 650 | 1 | 4 | |a Electronics and Microelectronics, Instrumentation. |
| 650 | 2 | 4 | |a Electronic Circuits and Systems. |
| 650 | 2 | 4 | |a Classical Mechanics. |
| 650 | 2 | 4 | |a Surfaces, Interfaces and Thin Film. |
| 650 | 2 | 4 | |a Solid Mechanics. |
| 700 | 1 | |a Layton, Richard A. |e author. |4 aut |4 http://id.loc.gov/vocabulary/relators/aut | |
| 710 | 2 | |a SpringerLink (Online service) | |
| 773 | 0 | |t Springer Nature eBook | |
| 776 | 0 | 8 | |i Printed edition: |z 9780387560588 |
| 776 | 0 | 8 | |i Printed edition: |z 9781489984210 |
| 776 | 0 | 8 | |i Printed edition: |z 9780387095103 |
| 856 | 4 | 0 | |u https://doi.uam.elogim.com/10.1007/978-0-387-09511-0 |z Texto Completo |
| 912 | |a ZDB-2-ENG | ||
| 912 | |a ZDB-2-SXE | ||
| 950 | |a Engineering (SpringerNature-11647) | ||
| 950 | |a Engineering (R0) (SpringerNature-43712) | ||