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  1. 1
    Low-k nanoporous interdielectrics : materials, thin film fabrications, structures and properties /
    by Ree, Moonhor
    Published 2010
    Other Authors: “…Yoon, Jinhwan…”
    Texto completo
    Electronic eBook
  2. 2
    Low-k nanoporous interdielectrics : materials, thin film fabrications, structures and properties /
    by Ree, Moonhor
    Published 2010
    Other Authors: “…Yoon, Jinhwan…”
    Texto completo
    Electronic eBook