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Interfacial Compatibility in Microelectronics Moving Away from the Trial and Error Approach /
by
Laurila, Tomi
,
Vuorinen, Vesa
,
Paulasto-Kröckel, Mervi
,
Turunen, Markus
,
Mattila, Toni T.
,
Kivilahti, Jorma
Published 2012
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Related Subjects
Microelectromechanical systems
Microsystems and MEMS
Microtechnology
Optical Materials
Optical materials
Surfaces (Technology)
Surfaces, Interfaces and Thin Film
Thin films
