Surface and Interface and Thin Film 75 Surfaces (Physics) Surfaces (Technology) 75 Surfaces, Interfaces and Thin Film Thin films 75 Spectroscopy 22 Spectrum analysis 22 Microelectromechanical systems 16 Microsystems and MEMS 16 Microtechnology 16 Polymers 16 Nanotechnology 15 Optical Materials 15 Optical materials 15 Laser 12 Lasers 12 Physical Chemistry 9 Physical chemistry 9 Semiconductors 8 Characterization and Analytical Technique 6 Materials-Analysis 6 Mathematical physics 6 Theoretical, Mathematical and Computational Physics 6 Atomic, Molecular and Chemical Physics 5 Atoms 5 Molecules 5 Nanophysics 5 Nanoscience 5 Condensed matter 4 Electronic Circuits and Systems 4