Nanotechnology Surfaces (Technology) 95 Surfaces, Interfaces and Thin Film Thin films 95 Microelectromechanical systems 31 Microsystems and MEMS 31 Microtechnology 31 Polymers 23 Spectroscopy 20 Spectrum analysis 20 Condensed Matter Physics 16 Condensed matter 16 Nanophysics 15 Nanoscience 15 Surface and Interface and Thin Film 15 Surfaces (Physics) 15 Characterization and Analytical Technique 13 Optical Materials 13 Optical materials 13 Materials-Analysis 12 Physical Chemistry 12 Physical chemistry 12 Materials Science 8 Materials science 8 Coatings 7 Laser 7 Lasers 7 Soft and Granular Matter 7 Soft condensed matter 7 Engineering 6