Nanophysics Nanoscience 26 Surface and Interface and Thin Film 26 Surfaces (Physics) Nanotechnology 15 Microelectromechanical systems 8 Microsystems and MEMS 8 Microtechnology 8 Optical Materials 8 Optical materials 8 Surfaces (Technology) 5 Surfaces, Interfaces and Thin Film 5 Thin films 5 Nanochemistry 4 Semiconductors 4 Spectroscopy 4 Spectrum analysis 4 Magnetism 3 Soft and Granular Matter 3 Soft condensed matter 3 Building materials 2 Electrochemistry 2 Laser 2 Lasers 2 Mathematical physics 2 Measurement 2 Measurement Science and Instrumentation 2 Measuring instruments 2 Microwaves, RF Engineering and Optical Communications 2 Physical Chemistry 2