Nanophysics Nanoscience 281 Nanotechnology 168 Microelectromechanical systems 116 Microsystems and MEMS 116 Microtechnology 116 Optical Materials 73 Optical materials 73 Nanochemistry 59 Laser 46 Lasers 46 Semiconductors 36 Condensed matter 26 Surface and Interface and Thin Film 26 Surfaces (Physics) 26 Condensed Matter Physics 25 Surfaces (Technology) 23 Surfaces, Interfaces and Thin Film 23 Thin films 23 Spectroscopy 21 Spectrum analysis 21 Characterization and Analytical Technique 20 Materials-Analysis 18 Microwaves, RF Engineering and Optical Communications 18 Telecommunication 18 Physical Chemistry 17 Physical chemistry 17 Physics 15 Applied and Technical Physics 14 Biophysics 14