Microelectromechanical systems 27 Microsystems and MEMS Microtechnology 27 Surface and Interface and Thin Film 27 Surfaces (Physics) Nanotechnology 17 Surfaces (Technology) 16 Surfaces, Interfaces and Thin Film 16 Thin films 16 Spectroscopy 11 Spectrum analysis 11 Polymers 10 Nanophysics 8 Nanoscience 8 Optical Materials 6 Optical materials 6 Nanochemistry 3 Coatings 2 Electrochemistry 2 Magnetism 2 Microwaves, RF Engineering and Optical Communications 2 Telecommunication 2 Automation 1 Biomaterials 1 Biophysics 1 Building materials 1 Characterization and Analytical Technique 1 Chemistry, Technical 1 Condensed Matter Physics 1 Condensed matter 1