Microelectromechanical systems 208 Microsystems and MEMS Microtechnology 208 Nanotechnology Nanophysics 81 Nanoscience 81 Nanochemistry 40 Optical Materials 39 Optical materials 39 Laser 31 Lasers 31 Surfaces (Technology) 31 Surfaces, Interfaces and Thin Film 31 Thin films 31 Condensed Matter Physics 24 Condensed matter 24 Polymers 22 Spectroscopy 18 Spectrum analysis 18 Surface and Interface and Thin Film 17 Surfaces (Physics) 17 Semiconductors 16 Mechanics, Applied 15 Biomedical Engineering and Bioengineering 13 Biomedical engineering 13 Characterization and Analytical Technique 13 Physical Chemistry 12 Physical chemistry 12 Biomaterials 11 Materials-Analysis 11