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00000cam a2200000 i 4500 |
| 001 |
SCIDIR_on1251765561 |
| 003 |
OCoLC |
| 005 |
20231120010543.0 |
| 006 |
m o d |
| 007 |
cr cnu---unuuu |
| 008 |
210519s2021 ne o 001 0 eng d |
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|a YDX
|b eng
|e rda
|e pn
|c YDX
|d OPELS
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|d OCLCO
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|d UKAHL
|d OCLCF
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|a GBC165560
|2 bnb
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| 016 |
7 |
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|a 020173490
|2 Uk
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| 019 |
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|a 1252914440
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| 020 |
|
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|a 9780128231807
|q (electronic book)
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| 020 |
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|a 0128231807
|q (electronic book)
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|z 9780128200490
|q (print)
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| 020 |
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|z 0128200499
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| 035 |
|
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|a (OCoLC)1251765561
|z (OCoLC)1252914440
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| 050 |
|
4 |
|a QC176.8.N35
|b M53 2021
|
| 050 |
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4 |
|a TJ1191.5
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| 082 |
0 |
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|a 620.5
|2 23
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| 082 |
0 |
4 |
|a 670
|2 23
|
| 245 |
0 |
0 |
|a Micro electro-fabrication /
|c edited by Tanveer Saleh, Mohamed Sultan Mohamed Ali, Kenichi Takahata.
|
| 264 |
|
1 |
|a Amsterdam ;
|a Cambridge, MA :
|b Elsevier,
|c [2021]
|
| 300 |
|
|
|a 1 online resource
|
| 336 |
|
|
|a text
|b txt
|2 rdacontent
|
| 337 |
|
|
|a computer
|b c
|2 rdamedia
|
| 338 |
|
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|a online resource
|b cr
|2 rdacarrier
|
| 490 |
1 |
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|a Micro and Nano Technologies
|
| 500 |
|
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|a Includes index.
|
| 588 |
0 |
|
|a Online resource; title from digital title page (viewed on June 10, 2021).
|
| 650 |
|
0 |
|a Nanoelectronics.
|
| 650 |
|
0 |
|a Microfabrication.
|
| 650 |
|
6 |
|a Nano�electronique.
|0 (CaQQLa)201-0225434
|
| 650 |
|
6 |
|a Microfabrication.
|0 (CaQQLa)201-0292593
|
| 650 |
|
7 |
|a Microfabrication
|2 fast
|0 (OCoLC)fst01019807
|
| 650 |
|
7 |
|a Nanoelectronics
|2 fast
|0 (OCoLC)fst01741867
|
| 700 |
1 |
|
|a Saleh, Tanveer,
|e editor.
|
| 700 |
1 |
|
|a Ali, Mohamed Sultan Mohamed,
|e editor.
|
| 700 |
1 |
|
|a Takahata, Kenichi,
|e editor.
|
| 776 |
0 |
8 |
|i Print version:
|t Micro electro-fabrication.
|d Amsterdam ; Cambridge, MA : Elsevier, [2021]
|z 0128200499
|z 9780128200490
|w (OCoLC)1159167796
|
| 830 |
|
0 |
|a Micro & nano technologies.
|
| 856 |
4 |
0 |
|u https://sciencedirect.uam.elogim.com/science/book/9780128200490
|z Texto completo
|
