Surface metrology for micro- and nanofabrication /

Detalles Bibliográficos
Clasificación:Libro Electrónico
Autor principal: Gao, Wei, Ph. D.
Formato: Electrónico eBook
Idioma:Inglés
Publicado: Amsterdam : Elsevier, [2021]
Colección:Micro & nano technologies.
Temas:
Nanostructured materials > Measurement.
Nanomanufacturing.
Nanofabrication.
Nanomanufacturing
Acceso en línea:Texto completo
Tabla de Contenidos:
  • Front Cover
  • Surface Metrology for Micro- and Nanofabrication
  • Copyright Page
  • Dedication
  • Contents
  • Preface
  • 1 Noncontact scanning electrostatic force microscope
  • 1.1 Introduction
  • 1.2 Principle of electrostatic force microscope for surface profile measurement
  • 1.3 Instrumentation of electrostatic force microscope
  • 1.3.1 Instrument configuration
  • 1.3.2 Electrostatic force microscope probe fabrication
  • 1.3.3 Electrostatic force microscope electronics
  • 1.4 Characterization of the electrostatic force microscope
  • 1.4.1 Tip-to-sample distance measurement
  • 1.4.2 Measurement of surface topography
  • 1.4.3 The vertical reciprocating scan mode
  • 1.5 Summary
  • References
  • 2 Quartz tuning fork atomic force microscope
  • 2.1 Introduction
  • 2.2 Tungsten probe QTF-AFM
  • 2.2.1 Self-oscillation QTF-AFM
  • 2.2.2 External-oscillation QTF-AFM
  • 2.3 Glass probe QTF-AFM
  • 2.3.1 Fabrication of the glass probe
  • 2.3.2 Optimization of the QTF glass probe
  • 2.3.3 Surface profile measurement by the QTF glass probe
  • 2.4 Summary
  • References
  • 3 Micropipette ball probing system
  • 3.1 Introduction
  • 3.2 Fabrication of the micropipette probe
  • 3.3 The probing system
  • 3.4 Measurement of microslit
  • 3.5 Summary
  • References
  • 4 Low-force elastic beam surface profiler
  • 4.1 Introduction
  • 4.2 Cantilever beam surface profiler
  • 4.3 Both ends supported beam surface profiler
  • 4.4 Rotary die cutter edge profile measurement
  • 4.5 Summary
  • References
  • 5 Linear-scan micro roundness measuring machine
  • 5.1 Introduction
  • 5.2 The stitching linear-scan method
  • 5.3 Linear-scan micro roundness measuring machine
  • 5.4 Improved setup with a round positioning jig
  • 5.5 Summary
  • References
  • 6 Micro-gear measuring machine
  • 6.1 Introduction
  • 6.2 The micro-gear measuring machine
  • 6.3 Self-calibration and compensation of setting errors
  • 6.4 Internal micro-gear measurement
  • 6.5 Summary
  • References
  • 7 On-machine length gauge surface profiler
  • 7.1 Introduction
  • 7.2 General issues in on-machine measurement
  • 7.3 Satellite mirror surface profiler
  • 7.4 Scroll surface profiler
  • 7.5 Summary
  • References
  • 8 On-machine air-bearing surface profiler
  • 8.1 Introduction
  • 8.2 Horizontal air-bearing profiler
  • 8.3 Vertical air-bearing profiler
  • 8.4 Dynamic behavior of air-bearing profiler
  • 8.5 Summary

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