Surface metrology for micro- and nanofabrication /

Detalles Bibliográficos
Clasificación:Libro Electrónico
Autor principal: Gao, Wei, Ph. D.
Formato: Electrónico eBook
Idioma:Inglés
Publicado: Amsterdam : Elsevier, [2021]
Colección:Micro & nano technologies.
Temas:
Nanostructured materials > Measurement.
Nanomanufacturing.
Nanofabrication.
Nanomanufacturing
Acceso en línea:Texto completo
Descripción
Notas:12 Self-calibration of probe tip radius and cutting edge sharpness.
Descripción Física:1 online resource (452 pages)
Bibliografía:References-9 On-machine atomic force microscope-9.1 Introduction-9.2 On-machine spiral scan atomic force microscope-9.3 On-machine automatic alignment atomic force microscope-9.4 Summary-References-10 On-machine roll profiler-10.1 Introduction-10.2 On-machine two-probe profiler-10.3 On-machine four-probe profiler-10.4 Summary-References-11 In-process fast tool servo profiler-11.1 Introduction-11.2 Force sensor-integrated fast tool servo-11.3 In-process surface profile measurement-11.4 In-process tool setting-11.5 Summary-References.
ISBN:9780128178515
0128178515

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