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Handbook of silicon wafer cleaning technology /
Handbook of Silicon Wafer Cleaning Technology, Third Edition, provides an in-depth discussion of cleaning, etching and surface conditioning for semiconductor applications. The fundamental physics and chemistry associated with wet and plasma processing are reviewed, including surface and colloidal as...
| Clasificación: | Libro Electrónico |
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| Otros Autores: | , |
| Formato: | Electrónico eBook |
| Idioma: | Inglés |
| Publicado: |
Cambridge, MA :
William Andrew,
[2018]
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| Edición: | Third edition. |
| Colección: | Materials science and process technology series.
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| Temas: | |
| Acceso en línea: | Texto completo |