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Nano- and microfabrication for industrial and biomedical applications /
Nano- and Microfabrication for Industrial and Biomedical Applications, Second Edition, focuses on the industrial perspective on micro- and nanofabrication methods, including large-scale manufacturing, the transfer of concepts from lab to factory, process tolerance, yield, robustness, and cost. The b...
| Clasificación: | Libro Electrónico |
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| Autor principal: | |
| Formato: | Electrónico eBook |
| Idioma: | Inglés |
| Publicado: |
Oxford, UK :
William Andrew is an imprint of Elsevier,
2016.
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| Edición: | Second edition. |
| Colección: | Micro & nano technologies.
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| Temas: | |
| Acceso en línea: | Texto completo |
Tabla de Contenidos:
- Front Cover; Nano- and Microfabrication for Industrial and Biomedical Applications; Copyright; Contents; Preface; Preface to First Edition; Author Biography; Chapter 1: Introduction; 1.1 Philosophy of Micro/Nanofabrication; 1.2 The Industry-Science Dualism; 1.3 Industrial Applications; 1.4 Purpose and Organization of This Book; References; Chapter 2: Basic technologies for microsystems; 2.1 Photolithography; 2.2 Thin Films; 2.2.1 Wet Deposition Techniques; 2.2.2 Vapor Deposition Techniques; 2.3 Silicon Micromachining; 2.3.1 Etching; Wet chemical etching; Dry etching.
- 2.3.2 Surface Micromachining2.3.3 Silicon Bulk Micromachining; Anisotropic wet chemical etching; Bosch process; 2.4 Industrially Established Nonsilicon Processing; 2.4.1 Quartz Etching; 2.4.2 Glass Wet Etching; 2.4.3 Photostructurable Glass; 2.4.4 Powder Blasting; 2.4.5 Plastic Microfabrication; Thick resist lithography; Laser ablation; Photopolymerization; Thermoplastic micromolding; 2.5 Soft-Lithography; 2.5.1 Principle of Soft-Lithography; 2.5.2 Types of Soft-Lithography; Replica molding; Microcontact printing; Microtransfer molding; Micromolding in capillaries.
- Solvent-assisted micromolding2.6 Nanolithography; 2.6.1 Why Do We Need the Term Nanolithography?; 2.6.2 Primary Nanolithography Techniques; Deep ultra violet nanolithography; Two-photon stereolithography; 2.6.3 Secondary Nanolithography; Thermal nanoimprinting; Step-and-flash nanolithography; 2.6.4 Miscellaneous Nanolithographic Techniques Commonly Practiced; Nanosphere lithography; Block-copolymer lithography; 2.7 Conclusions; References; Chapter 3: Advanced microfabrication methods; 3.1 LIGA; 3.2 Deep Reactive Ion Etching; 3.3 Microceramic Processing; 3.3.1 Micromolding.
- 3.3.2 Ceramic Microparts by LIGA3.3.3 Utilizing Capillaries for Ceramic Micromolding; 3.3.4 Utilizing Soft-Mold Replication; 3.3.5 Ceramic Patterning on Curved Substrates; 3.3.6 Patterning Ceramic Materials at Nanoscale Resolution; 3.4 Speciality Substrates and Their Applications; 3.4.1 Silicon-on-Insulator (SOI); 3.4.2 Electro-Optic Substrates; 3.4.3 III/V Semiconductor Substrates; 3.5 Advanced Non-Silicon and Silicon Hybrid Devices; 3.5.1 Nanofabrication of Information Storage Devices; 3.5.2 Integrated Optics; 3.6 Planar Lightwave Circuits.
- 3.7 Fabrication Example of an Integrated Optical Device3.8 Integrated Optics in the MST Foundry Service Industry: A Case Study; 3.9 Biohybrid Devices: A New Trend; 3.10 Conclusions; References; Chapter 4: Nanotechnology; 4.1 Top-Down, Bottom-Up; 4.1.1 Lithographic Techniques in Nanotechnology; 4.1.2 Lithography for Nanoarrays; 4.1.3 Top-Down Nanolithographic Principles; 4.1.4 Nanolithographic Technologies for the Microelectronics Industry; EUV lithography; 4.1.5 Nanoimprint Technology; 4.1.6 Case Studies: Nanoimprint Applications; Patterned magnetic media; Random access memory.