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Plasma sources for thin film deposition and etching /

Detalles Bibliográficos
Clasificación:	Libro Electrónico
Otros Autores:	Francombe, Maurice H. (Editor ), Vossen, John L. (Editor )
Formato:	Electrónico eBook
Idioma:	Inglés
Publicado:	San Diego, CA. : Academic Press, 1994.
Colección:	Physics of thin films ; volume 18.
Temas:	Thin films. Couches minces. Thin films D�unne Schicht Herstellung Plasmaanlage �Atzen Projection au plasma. Technique des plasmas. Congress proceedings (reports) Conference papers and proceedings Conference papers and proceedings. Actes de congr�es.
Acceso en línea:	Texto completo

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