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Metal-semiconductor contacts and devices /

Metal - Semiconductor Contacts and Devices.

Detalles Bibliográficos
Clasificación:Libro Electrónico
Autor principal: Cohen, Simon S.
Otros Autores: Gildenblat, Gennady Sh
Formato: Electrónico eBook
Idioma:Inglés
Publicado: Orlando : Academic Press, 1986.
Colección:VLSI electronics ; v. 13.
Temas:
Acceso en línea:Texto completo
Texto completo

MARC

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245 1 0 |a Metal-semiconductor contacts and devices /  |c Simon S. Cohen, Gennady Sh. Gildenblat. 
260 |a Orlando :  |b Academic Press,  |c 1986. 
300 |a 1 online resource (x, 424 pages) :  |b illustrations 
336 |a text  |b txt  |2 rdacontent 
337 |a computer  |b c  |2 rdamedia 
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490 1 |a VLSI electronics ;  |v v. 13 
504 |a Includes bibliographical references and index. 
588 0 |a Print version record. 
506 |3 Use copy  |f Restrictions unspecified  |2 star  |5 MiAaHDL 
533 |a Electronic reproduction.  |b [Place of publication not identified] :  |c HathiTrust Digital Library,  |d 2014.  |5 MiAaHDL 
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505 0 |a Front Cover; Metal -- Semiconductor Contacts and Devices; Copyright Page; Dedication; Table of Contents; Preface; Chapter 1. Introduction; REFERENCES; Chapter 2. Electrical Characteristics of the Metal -- Semiconductor Interface; 2.1. INTRODUCTION; 2.2. THE INTERFACE BARRIER AND SPACE CHARGE REGION; 2.3. GENERALIZED TRANSPORT THEORY AT LOW DOPANT LEVELS; 2.4. TUNNELING ACROSS THE INTERFACE; 2.5. MINORITY CARRIER INJECTION RATIO; REFERENCES; Chapter 3. Experimental Methods of Barrier Height Determination; 3.1. INTRODUCTION; 3.2. THE FORWARD BIAS l-V METHOD 
505 8 |a 3.3. FORWARD BIAS l-V METHOD FOR SCHOTTKY DIODES WITH HIGH SERIES RESISTANCE3.4. THE CAPACITANCE-VOLTAGE METHOD; 3.5. THE CORRELATION BETWEEN THE BARRIER HEIGHT AND THE IDEALITY FACTOR OF THE SCHOTTKY DIODE; 3.6. REVERSE BIAS CURRENT-VOLTAGE CHARACTERISTICS; 3.7. THE PHOTOEXCITATION METHOD; REFERENCES; Chapter 4. Test Structures for Ohmic Contact Characterization; 4.1. INTRODUCTION; 4.2. SIMPLE METHODS FOR CONTACT RESISTANCE MEASUREMENTS; 4.3. TRANSFER LENGTH METHOD; 4.4. THE CIRCULAR TRANSMISSION LINE MODEL; 4.5. FINITE DEPTH EFFECTS; 4.6. THE FOUR-TERMINAL RESISTOR; REFERENCES 
505 8 |a 6.7. REFRACTORY METAL CONTACTS TO SILICON6.8. OTHER METAL-SILICON SYSTEMS; REFERENCES; Chapter 7. Other Metal -- Semiconductor Contact Systems; 7.1. INTRODUCTION; 7.2. OHMIC CONTACTS TO III -- V COMPOUND SEMICONDUCTORS; 7.3. POLYSILICON EMITTER CONTACTS; REFERENCES; Chapter 8. Metal -- Semiconductor Devices; 8.1. INTRODUCTION; 8.2. SCHOTTKY BARRIER MOS TRANSISTORS; 8.3. SCHOTTKY DIODES IN BIPOLAR INTEGRATED CIRCUITS; 8.4. THE METAL-SEMICONDUCTOR FIELD-EFFECT TRANSISTOR; REFERENCES; Appendix I: Modified Bessel Functions; Appendix II: Thin-Film Resistors 
505 8 |a Appendix III: Physical Properties of Common Semiconductor MaterialsAppendix IV: Selected Properties of Commonly Used Metals; Index 
505 8 |a Chapter 5. Contact Fabrication Procedures5.1. INTRODUCTION; 5.2. BASIC ELEMENTS OF IC DEVICE PROCESSING; 5.3. THE CHEMISTRY OF CONTACT HOLE OPENING; 5.4. CONTACT GEOMETRY; 5.5. METAL DEPOSITION TECHNIQUES; 5.6. CONTACT METALLIZATION DEFINITION TECHNIQUES; 5.7. DETAILS OF SHALLOW JUNCTION FORMATION; REFERENCES; Chapter 6. Practical Ohmic Contacts to Silicon; 6.1. INTRODUCTION; 6.2. REQUIREMENTS ON OHMIC CONTACTS FOR VLSI; 6.3. METALLURGICAL CONSIDERATIONS; 6.4. CONTACT ELECTROMIGRATION; 6.5. ALUMINUM-BASED CONTACT METALLIZATIONS; 6.6. SILICIDE CONTACT METALLIZATION 
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650 0 |a Semiconductor-metal boundaries. 
650 0 |a Electric contacts. 
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650 6 |a Contacts �electriques.  |0 (CaQQLa)201-0076382 
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650 7 |a Semiconductor-metal boundaries  |2 fast  |0 (OCoLC)fst01112197 
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653 0 |a Integrated circuits 
700 1 |a Gildenblat, Gennady Sh. 
776 0 8 |i Print version:  |a Cohen, Simon S.  |t Metal-semiconductor contacts and devices.  |d Orlando : Academic Press, 1986  |w (DLC) 85020077  |w (OCoLC)12551871 
830 0 |a VLSI electronics ;  |v v. 13. 
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