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Sputtering materials for VLSI and thin film devices /

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An important resource for the microelectronics and flat panel display industries, this book focuses on the development of sputtering targets for conductor, diffusion barrier, reflective, data storage and display applications. Sarkar reviews essential microelectronics industry topics, including: hist...

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Detalles Bibliográficos
Clasificación:	Libro Electrónico
Autor principal:	Sarkar, Jaydeep (Autor)
Formato:	Electrónico eBook
Idioma:	Inglés
Publicado:	Norwich, N.Y. : William Andrew, 2011.
Temas:	Microelectronics > Materials. Flat panel displays > Materials. Sputtering (Physics) �Ecrans plats > Mat�eriaux. Pulv�erisation cathodique. TECHNOLOGY & ENGINEERING > Mechanical.
Acceso en línea:	Texto completo

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