Ion beam modification of materials : proceedings of the ninth International Conference on Ion Beam Modification of Materials, Canberra, Australia, 5-10 February, 1995 /
Clasificación: | Libro Electrónico |
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Autor Corporativo: | |
Otros Autores: | , , |
Formato: | Electrónico Congresos, conferencias eBook |
Idioma: | Inglés |
Publicado: |
Amsterdam ; New York :
Elsevier Science,
1996.
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Temas: | |
Acceso en línea: | Texto completo |
Tabla de Contenidos:
- pt. I, section I. Basic processes ; section II. Low energy processes ; section III. Defect formation and annealing of semiconductors ; section IV. Semiconductor processing, devices and optical materials ; section V. Modification of non-semiconductor materials ; section VI. Novel processing : applications and techniques
- pt. II, section A. Basic processes ; section B. Low-energy processes ; section C. Defect formation and annealing of semiconductors ; section D. Semiconductor processing, devices and optical materials ; section E. Modification of non-semiconductor materials ; section F. Novel processing : applications and techniques.