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Impurity doping processes in silicon /

This book introduces to non-experts several important processes of impurity doping in silicon and goes on to discuss the methods of determination of the concentration of dopants in silicon. The conventional method used is the discussion process, but, since it has been sufficiently covered in many te...

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Detalles Bibliográficos
Clasificación:Libro Electrónico
Otros Autores: Wang, Franklin F. Y., 1928- (Editor )
Formato: Electrónico eBook
Idioma:Inglés
Publicado: [Place of publication not identified] : North Holland, 1981.
Colección:Materials processing, theory and practices ; v. 2.
Temas:
Acceso en línea:Texto completo
Texto completo
Descripción
Sumario:This book introduces to non-experts several important processes of impurity doping in silicon and goes on to discuss the methods of determination of the concentration of dopants in silicon. The conventional method used is the discussion process, but, since it has been sufficiently covered in many texts, this work describes the double-diffusion method.
Notas:Title from publisher supplied information (viewed November 30, 2012).
Descripción Física:1 online resource
ISBN:0444860959
9780444860958