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Handbook of sputter deposition technology : fundamentals and applications for functional thin films, nano-materials and MEMS /
This thoroughly updated new edition includes an entirely new team of contributing authors with backgrounds specializing in the various new applications of sputtering technology. It forms a bridge between fundamental theory and practical application, giving an insight into innovative new materials, d...
| Clasificación: | Libro Electrónico |
|---|---|
| Otros Autores: | , , , |
| Formato: | Electrónico eBook |
| Idioma: | Inglés |
| Publicado: |
Waltham, MA :
William Andrew,
�2012.
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| Edición: | 2nd ed. |
| Temas: | |
| Acceso en línea: | Texto completo |