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Handbook of sputter deposition technology : fundamentals and applications for functional thin films, nano-materials and MEMS /
This thoroughly updated new edition includes an entirely new team of contributing authors with backgrounds specializing in the various new applications of sputtering technology. It forms a bridge between fundamental theory and practical application, giving an insight into innovative new materials, d...
| Clasificación: | Libro Electrónico |
|---|---|
| Otros Autores: | , , , |
| Formato: | Electrónico eBook |
| Idioma: | Inglés |
| Publicado: |
Waltham, MA :
William Andrew,
�2012.
|
| Edición: | 2nd ed. |
| Temas: | |
| Acceso en línea: | Texto completo |
MARC
| LEADER | 00000cam a2200000 a 4500 | ||
|---|---|---|---|
| 001 | SCIDIR_ocn814380384 | ||
| 003 | OCoLC | ||
| 005 | 20231117044747.0 | ||
| 006 | m o d | ||
| 007 | cr cnu---unuuu | ||
| 008 | 121025s2012 mau obf 001 0 eng d | ||
| 040 | |a OPELS |b eng |e pn |c OPELS |d OCLCQ |d IDEBK |d OCLCF |d UIU |d OCL |d OCLCQ |d TXI |d OCLCQ |d U3W |d D6H |d WYU |d LEAUB |d UKAHL |d OL$ |d S2H |d OCLCO |d UX1 |d VT2 |d OCLCQ |d OCLCO |d OCLCQ | ||
| 019 | |a 1066589560 |a 1100698888 |a 1235118637 |a 1235843336 | ||
| 020 | |a 9781437734843 |q (e-book) | ||
| 020 | |a 1437734847 | ||
| 020 | |z 9781437734836 | ||
| 020 | |z 1437734839 | ||
| 035 | |a (OCoLC)814380384 |z (OCoLC)1066589560 |z (OCoLC)1100698888 |z (OCoLC)1235118637 |z (OCoLC)1235843336 | ||
| 050 | 4 | |a TS695 |b .H36 2012 | |
| 082 | 0 | 4 | |a 671.7/38 |2 23 |
| 245 | 0 | 0 | |a Handbook of sputter deposition technology : |b fundamentals and applications for functional thin films, nano-materials and MEMS / |c Hideaki Adachi [and others] ; edited by Kiyotaka Wasa, Isaku Kanno, Hidetoshi Kotera. |
| 250 | |a 2nd ed. | ||
| 260 | |a Waltham, MA : |b William Andrew, |c �2012. | ||
| 300 | |a 1 online resource | ||
| 336 | |a text |b txt |2 rdacontent | ||
| 337 | |a computer |b c |2 rdamedia | ||
| 338 | |a online resource |b cr |2 rdacarrier | ||
| 520 | |a This thoroughly updated new edition includes an entirely new team of contributing authors with backgrounds specializing in the various new applications of sputtering technology. It forms a bridge between fundamental theory and practical application, giving an insight into innovative new materials, devices and systems. Organized into three parts for ease of use, this Handbook introduces the fundamentals of thin films and sputtering deposition, explores the theory and practices of this field, and also covers new technology such as nano-functional materials and MEMS. Wide varieties of functional thin film materials and processing are described, and experimental data is provided with detailed examples and theoretical descriptions. A strong applications focus, covering current and emerging technologies, including nano-materials and MEMS (microelectrolmechanical systems) for energy, environments, communications, and/or bio-medical field. New chapters on computer simulation of sputtering and MEMS completes the update and insures that the new edition includes the most current and forward-looking coverage available. All applications discussed are supported by theoretical discussions, offering readers both the "how" and the "why" of each technique. 40% revision: the new edition includes an entirely new team of contributing authors with backgrounds specializing in the various new applications that are covered in the book and providing the most up-to-date coverage available anywhere | ||
| 500 | |a Title from publisher's Web site; (ScienceDirect; viewed on Oct. 25, 2012). | ||
| 505 | 0 | |a pt. I. Fundamentals of sputtering -- pt. II. Theory and practice : sputtering deposition of functional thin films -- pt. III. Sputtering technology for nanomaterials and thin film MEMS. | |
| 504 | |a Includes bibliographical references and index. | ||
| 650 | 0 | |a Cathode sputtering (Plating process) |v Handbooks, manuals, etc. | |
| 650 | 0 | |a Thin films |v Handbooks, manuals, etc. | |
| 650 | 6 | |a Pulv�erisation cathodique |0 (CaQQLa)201-0180809 |x Applications industrielles |0 (CaQQLa)201-0180809 |v Guides, manuels, etc. |0 (CaQQLa)201-0377046 | |
| 650 | 6 | |a Couches minces |0 (CaQQLa)201-0035883 |v Guides, manuels, etc. |0 (CaQQLa)201-0377046 | |
| 650 | 7 | |a Cathode sputtering (Plating process) |2 fast |0 (OCoLC)fst00849113 | |
| 650 | 7 | |a Thin films. |2 fast |0 (OCoLC)fst01150018 | |
| 655 | 7 | |a manuals (instructional materials) |2 aat |0 (CStmoGRI)aatgf300026395 | |
| 655 | 7 | |a handbooks. |2 aat |0 (CStmoGRI)aatgf300311807 | |
| 655 | 7 | |a Handbooks and manuals. |2 fast |0 (OCoLC)fst01423877 | |
| 655 | 7 | |a Handbooks and manuals. |2 lcgft | |
| 655 | 7 | |a Guides et manuels. |2 rvmgf |0 (CaQQLa)RVMGF-000001065 | |
| 700 | 1 | |a Adachi, Hideaki. | |
| 700 | 1 | |a Wasa, Kiyotaka. | |
| 700 | 1 | |a Kanno, Isaku. | |
| 700 | 1 | |a Kotera, Hidetoshi. | |
| 776 | 0 | 8 | |i Print version: |t Handbook of sputter deposition technology. |b 2nd ed. |d Waltham, MA : William Andrew, �2012 |w (DLC) 2013370233 |
| 856 | 4 | 0 | |u https://sciencedirect.uam.elogim.com/science/book/9781437734836 |z Texto completo |