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Industrial micro & nano fabrication /
This book focuses on the industrial perspective for micro- and nanofabrication methods including large-scale manufacturing, transfer of concepts from lab to factory, process tolerance, yield, robustness, and cost. It gives a history of miniaturization, micro- and nanofabrication, and surveys industr...
| Clasificación: | Libro Electrónico |
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| Autor principal: | |
| Formato: | Electrónico eBook |
| Idioma: | Inglés |
| Publicado: |
Norwich, N.Y. : Oxford :
William Andrew ; Elsevier Science [distributor],
2010.
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| Colección: | Micro and nano technologies series
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| Temas: | |
| Acceso en línea: | Texto completo |
Tabla de Contenidos:
- Microsystems technology; Nanotechnology; Microsystems for Information Technology; Micro and nanomechanical sensors and actuators; Sensors for chemical and medical applications; Microfluidic systems; Micro and nanotechnology for sustainable energy.