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Industrial micro & nano fabrication /
This book focuses on the industrial perspective for micro- and nanofabrication methods including large-scale manufacturing, transfer of concepts from lab to factory, process tolerance, yield, robustness, and cost. It gives a history of miniaturization, micro- and nanofabrication, and surveys industr...
| Clasificación: | Libro Electrónico |
|---|---|
| Autor principal: | |
| Formato: | Electrónico eBook |
| Idioma: | Inglés |
| Publicado: |
Norwich, N.Y. : Oxford :
William Andrew ; Elsevier Science [distributor],
2010.
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| Colección: | Micro and nano technologies series
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| Temas: | |
| Acceso en línea: | Texto completo |
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| 100 | 1 | |a Luttge, Regina. | |
| 245 | 1 | 0 | |a Industrial micro & nano fabrication / |c by Regina Luttge. |
| 260 | |a Norwich, N.Y. : |b William Andrew ; |a Oxford : |b Elsevier Science [distributor], |c 2010. | ||
| 300 | |a 1 online resource (1 volume) | ||
| 336 | |a text |b txt |2 rdacontent | ||
| 337 | |a computer |b c |2 rdamedia | ||
| 338 | |a online resource |b cr |2 rdacarrier | ||
| 490 | 0 | |a Micro and nano technologies series | |
| 520 | |a This book focuses on the industrial perspective for micro- and nanofabrication methods including large-scale manufacturing, transfer of concepts from lab to factory, process tolerance, yield, robustness, and cost. It gives a history of miniaturization, micro- and nanofabrication, and surveys industrial fields of application, illustrating fabrication processes of relevant micro and nano devices. Concerning sub-micron feature manufacture, the book explains: the philosophy of micro/ nanofabrication for integrated circuit industry; thin film deposition; (waveguide, plastic, semiconductor) material processing; packaging; interconnects; stress (e.g., thin film residual); economic; and environmental aspects. Micro/nanomechanical sensors and actuators are explained in depth with information on applications, materials (incl. functional polymers), methods, testing, fabrication, integration, reliability, magnetic microstructures, etc. . Shows engineers & students how to evaluate the potential value of current and nearfuture manufacturing processes for miniaturized systems in industrial environments . Explains the top-down and bottom up approaches to nanotechnology, nanostructures fabricated with beams, nano imprinting methods, nanoparticle manufacturing (and their health aspects), nanofeature analysis, and connecting nano to micro to macro . Discusses issues for practical application cases; possibilities of dimension precision; large volume manufacturing of micro- & nanostructures (machines, materials, costs) . Explains applications of Microsystems for information technology, e.g.: data recording (camera, microphone), storage (memories, CDs), communication; computing; and displays (beamers, LCD, TFT) . Case studies are given for sensors, resonators, probes, transdermal medical systems, micro- pumps & valves, inkjets, DNA-analysis, lab-on-a-chip, & micro-cooling. | ||
| 505 | 0 | |a Microsystems technology; Nanotechnology; Microsystems for Information Technology; Micro and nanomechanical sensors and actuators; Sensors for chemical and medical applications; Microfluidic systems; Micro and nanotechnology for sustainable energy. | |
| 588 | 0 | |a Print version record. | |
| 650 | 0 | |a Microfabrication. | |
| 650 | 0 | |a Nanotechnology. | |
| 650 | 6 | |a Microfabrication. |0 (CaQQLa)201-0292593 | |
| 650 | 6 | |a Nanotechnologie. |0 (CaQQLa)201-0225435 | |
| 650 | 7 | |a Microfabrication |2 fast |0 (OCoLC)fst01019807 | |
| 650 | 7 | |a Nanotechnology |2 fast |0 (OCoLC)fst01032639 | |
| 776 | 0 | 8 | |i Print version: |a Luttge, Regina. |t Industrial micro & nano fabrication. |d Norwich, N.Y. : William Andrew ; Oxford : Elsevier Science [distributor], 2010 |z 9780815515821 |w (OCoLC)651074593 |
| 856 | 4 | 0 | |u https://sciencedirect.uam.elogim.com/science/book/9780815515821 |z Texto completo |