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Beam processing technologies /
| Clasificación: | Libro Electrónico |
|---|---|
| Otros Autores: | , , |
| Formato: | Electrónico eBook |
| Idioma: | Inglés |
| Publicado: |
San Diego, Calif. :
Academic Press,
�1989.
|
| Colección: | VLSI electronics ;
v. 21. |
| Temas: | |
| Acceso en línea: | Texto completo Texto completo |
MARC
| LEADER | 00000cam a2200000 a 4500 | ||
|---|---|---|---|
| 001 | SCIDIR_ocn714902537 | ||
| 003 | OCoLC | ||
| 005 | 20231117044604.0 | ||
| 006 | m o d | ||
| 007 | cr bn||||||abp | ||
| 007 | cr bn||||||ada | ||
| 008 | 110425s1989 caua ob 001 0 eng d | ||
| 040 | |a OCLCE |b eng |e pn |c OCLCE |d OCLCQ |d OCLCF |d OCLCQ |d UIU |d OCLCO |d EBLCP |d N$T |d DEBSZ |d OCLCQ |d UAB |d MERUC |d OCLCQ |d STF |d OCLCQ |d OCLCO |d OCLCQ | ||
| 019 | |a 761320474 |a 897652073 |a 987646750 |a 1187187106 |a 1197570032 | ||
| 020 | |a 9781483217857 | ||
| 020 | |a 148321785X | ||
| 020 | |z 9780122341212 | ||
| 020 | |z 012234121X | ||
| 035 | |a (OCoLC)714902537 |z (OCoLC)761320474 |z (OCoLC)897652073 |z (OCoLC)987646750 |z (OCoLC)1187187106 |z (OCoLC)1197570032 | ||
| 042 | |a dlr | ||
| 050 | 4 | |a TK7874 |b .V56 v.21 | |
| 072 | 7 | |a TEC |x 009070 |2 bisacsh | |
| 082 | 0 | 4 | |a 621.395 |
| 245 | 0 | 0 | |a Beam processing technologies / |c edited by Norman G. Einspruch, S.S. Cohen, Raj N. Singh. |
| 260 | |a San Diego, Calif. : |b Academic Press, |c �1989. | ||
| 300 | |a 1 online resource (xii, 546 pages) : |b illustrations | ||
| 336 | |a text |b txt |2 rdacontent | ||
| 337 | |a computer |b c |2 rdamedia | ||
| 338 | |a online resource |b cr |2 rdacarrier | ||
| 490 | 1 | |a VLSI electronics : microstructure science ; |v v. 21 | |
| 504 | |a Includes bibliographical references and index. | ||
| 506 | |3 Use copy |f Restrictions unspecified |2 star |5 MiAaHDL | ||
| 533 | |a Electronic reproduction. |b [Place of publication not identified] : |c HathiTrust Digital Library, |d 2011. |5 MiAaHDL | ||
| 538 | |a Master and use copy. Digital master created according to Benchmark for Faithful Digital Reproductions of Monographs and Serials, Version 1. Digital Library Federation, December 2002. |u http://purl.oclc.org/DLF/benchrepro0212 |5 MiAaHDL | ||
| 583 | 1 | |a digitized |c 2011 |h HathiTrust Digital Library |l committed to preserve |2 pda |5 MiAaHDL | |
| 588 | 0 | |a Print version record. | |
| 650 | 0 | |a Integrated circuits |x Very large scale integration. | |
| 650 | 0 | |a Electron beams. | |
| 650 | 0 | |a Ion bombardment. | |
| 650 | 0 | |a Molecular beam epitaxy. | |
| 650 | 6 | |a Circuits int�egr�es �a tr�es grande �echelle. |0 (CaQQLa)201-0117255 | |
| 650 | 6 | |a Faisceaux �electroniques. |0 (CaQQLa)201-0004712 | |
| 650 | 6 | |a Bombardement ionique. |0 (CaQQLa)201-0004234 | |
| 650 | 6 | |a �Epitaxie par jets mol�eculaires. |0 (CaQQLa)201-0282349 | |
| 650 | 7 | |a TECHNOLOGY & ENGINEERING |x Mechanical. |2 bisacsh | |
| 650 | 7 | |a Electron beams. |2 fast |0 (OCoLC)fst00906654 | |
| 650 | 7 | |a Integrated circuits |x Very large scale integration. |2 fast |0 (OCoLC)fst00975602 | |
| 650 | 7 | |a Ion bombardment. |2 fast |0 (OCoLC)fst00978567 | |
| 650 | 7 | |a Molecular beam epitaxy. |2 fast |0 (OCoLC)fst01024729 | |
| 700 | 1 | |a Einspruch, Norman G. | |
| 700 | 1 | |a Cohen, Simon S. |q (Simon S.) | |
| 700 | 1 | |a Singh, Raj N. | |
| 776 | 0 | 8 | |i Print version: |t Beam processing technologies. |d San Diego, Calif. : Academic Press, �1989 |w (OCoLC)20029544 |
| 830 | 0 | |a VLSI electronics ; |v v. 21. | |
| 856 | 4 | 0 | |u https://sciencedirect.uam.elogim.com/science/book/9780122341212 |z Texto completo |
| 856 | 4 | 0 | |u https://sciencedirect.uam.elogim.com/science/bookseries/07367031/21 |z Texto completo |