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Lithography for VLSI /

Detalles Bibliográficos
Clasificación:	Libro Electrónico
Otros Autores:	Einspruch, Norman G., Watts, R. K. (Roderick K.), 1939-
Formato:	Electrónico eBook
Idioma:	Inglés
Publicado:	Orlando : Academic Press, 1987.
Colección:	VLSI electronics ; v. 16.
Temas:	Integrated circuits > Very large scale integration. Printed circuits. Lithography. Circuits int�egr�es �a tr�es grande �echelle. Circuits imprim�es. Lithographie. lithography. TECHNOLOGY & ENGINEERING > Mechanical.
Acceso en línea:	Texto completo Texto completo

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