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Lithography for VLSI /
| Clasificación: | Libro Electrónico |
|---|---|
| Otros Autores: | , |
| Formato: | Electrónico eBook |
| Idioma: | Inglés |
| Publicado: |
Orlando :
Academic Press,
1987.
|
| Colección: | VLSI electronics ;
v. 16. |
| Temas: | |
| Acceso en línea: | Texto completo Texto completo |
MARC
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|---|---|---|---|
| 001 | SCIDIR_ocn714878380 | ||
| 003 | OCoLC | ||
| 005 | 20231117044603.0 | ||
| 006 | m o d | ||
| 007 | cr bn||||||abp | ||
| 007 | cr bn||||||ada | ||
| 008 | 110425s1987 flua ob 001 0 eng d | ||
| 040 | |a OCLCE |b eng |e pn |c OCLCE |d OCLCQ |d OCLCF |d OCLCQ |d UIU |d EBLCP |d N$T |d IDEBK |d DEBSZ |d OCLCQ |d UAB |d OCLCQ |d MERUC |d OCLCQ |d STF |d OCLCQ |d OCLCO |d OCLCQ | ||
| 019 | |a 760980442 |a 897652064 |a 987693115 | ||
| 020 | |a 9781483217826 | ||
| 020 | |a 1483217825 | ||
| 020 | |z 0122341163 |q (alk. paper) | ||
| 020 | |z 9780122341168 |q (alk. paper) | ||
| 035 | |a (OCoLC)714878380 |z (OCoLC)760980442 |z (OCoLC)897652064 |z (OCoLC)987693115 | ||
| 042 | |a dlr | ||
| 050 | 4 | |a TK7874 |b .V56 vol. 16 | |
| 072 | 7 | |a TEC |x 009070 |2 bisacsh | |
| 082 | 0 | 4 | |a 621.381/73 s |a 621.381/73 |2 19 |
| 245 | 0 | 0 | |a Lithography for VLSI / |c edited by Norman G. Einspruch, R.K. Watts. |
| 260 | |a Orlando : |b Academic Press, |c 1987. | ||
| 300 | |a 1 online resource (xi, 361 pages) : |b illustrations | ||
| 336 | |a text |b txt |2 rdacontent | ||
| 337 | |a computer |b c |2 rdamedia | ||
| 338 | |a online resource |b cr |2 rdacarrier | ||
| 490 | 1 | |a VLSI electronics ; |v v. 16 | |
| 504 | |a Includes bibliographical references and index. | ||
| 506 | |3 Use copy |f Restrictions unspecified |2 star |5 MiAaHDL | ||
| 533 | |a Electronic reproduction. |b [Place of publication not identified] : |c HathiTrust Digital Library, |d 2011. |5 MiAaHDL | ||
| 538 | |a Master and use copy. Digital master created according to Benchmark for Faithful Digital Reproductions of Monographs and Serials, Version 1. Digital Library Federation, December 2002. |u http://purl.oclc.org/DLF/benchrepro0212 |5 MiAaHDL | ||
| 583 | 1 | |a digitized |c 2011 |h HathiTrust Digital Library |l committed to preserve |2 pda |5 MiAaHDL | |
| 588 | 0 | |a Print version record. | |
| 650 | 0 | |a Integrated circuits |x Very large scale integration. | |
| 650 | 0 | |a Printed circuits. | |
| 650 | 0 | |a Lithography. | |
| 650 | 6 | |a Circuits int�egr�es �a tr�es grande �echelle. |0 (CaQQLa)201-0117255 | |
| 650 | 6 | |a Circuits imprim�es. |0 (CaQQLa)201-0036099 | |
| 650 | 6 | |a Lithographie. |0 (CaQQLa)201-0035863 | |
| 650 | 7 | |a lithography. |2 aat |0 (CStmoGRI)aat300053271 | |
| 650 | 7 | |a TECHNOLOGY & ENGINEERING |x Mechanical. |2 bisacsh | |
| 650 | 7 | |a Integrated circuits |x Very large scale integration. |2 fast |0 (OCoLC)fst00975602 | |
| 650 | 7 | |a Lithography. |2 fast |0 (OCoLC)fst01000265 | |
| 650 | 7 | |a Printed circuits. |2 fast |0 (OCoLC)fst01076537 | |
| 700 | 1 | |a Einspruch, Norman G. | |
| 700 | 1 | |a Watts, R. K. |q (Roderick K.), |d 1939- | |
| 776 | 0 | 8 | |i Print version: |t Lithography for VLSI. |d Orlando : Academic Press, 1987 |w (DLC) 86032156 |w (OCoLC)15016955 |
| 830 | 0 | |a VLSI electronics ; |v v. 16. | |
| 856 | 4 | 0 | |u https://sciencedirect.uam.elogim.com/science/book/9780122341168 |z Texto completo |
| 856 | 4 | 0 | |u https://sciencedirect.uam.elogim.com/science/bookseries/07367031/16 |z Texto completo |