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Developments in surface contamination and cleaning. Volume three, Methods for removal of particle contaminants /
The contributions in this volume cover methods for removal of particle contaminants on surfaces. Several of these methods are well established and have been employed in industrial applications for a long time. However, the ever- higher demand for removal of smaller particles on newer substrate mater...
| Clasificación: | Libro Electrónico |
|---|---|
| Otros Autores: | , |
| Formato: | Electrónico eBook |
| Idioma: | Inglés |
| Publicado: |
Amsterdam ; Boston :
Elsevier,
�2011.
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| Temas: | |
| Acceso en línea: | Texto completo |
Tabla de Contenidos:
- Aqueous Methods
- Megasonic Cleaning
- Hydrodynamic Removal of Particles
- Brush Cleaning
- Laser Methods for Cleaning
- CO₂ Pellet Cleaning
- Cleaning Using Acoustic Fields
- Precision Cleaning Using Cluster Beams
- Electrostatic Methods for Cleaning
- Wipers for Cleaning
- Projectile Cleaning.