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Ion beam assisted film growth /

This volume provides up to date information on the experimental, theoretical and technological aspects of film growth assisted by ion beams. Ion beam assisted film growth is one of the most effective techniques in aiding the growth of high-quality thin solid films in a controlled way. Moreover, ion...

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Detalles Bibliográficos
Clasificación:Libro Electrónico
Otros Autores: Itoh, Tadatsugu
Formato: Electrónico eBook
Idioma:Inglés
Publicado: Amsterdam ; New York : Elsevier, 1989.
Colección:Beam modification of materials ; 3.
Temas:
Acceso en línea:Texto completo
Descripción
Sumario:This volume provides up to date information on the experimental, theoretical and technological aspects of film growth assisted by ion beams. Ion beam assisted film growth is one of the most effective techniques in aiding the growth of high-quality thin solid films in a controlled way. Moreover, ion beams play a dominant role in the reduction of the growth temperature of thin films of high melting point materials. In this way, ion beams make a considerable and complex contribution to film growth. The volume will be essential reading for scientists, engineers and students working in this field.
Descripción Física:1 online resource (xvii, 439 pages) : illustrations
Bibliografía:Includes bibliographical references and indexes.
ISBN:9780444599087
0444599088