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A user's guide to ellipsometry /

This book is specifically designed for the user who wishes expanded use of ellipsometry beyond the relatively limited number of turn-key applications. The book provides a concise discussion of theory and instrumentation before describing how to use optical parameters to determine material properties...

Descripción completa

Detalles Bibliográficos
Clasificación:Libro Electrónico
Autor principal: Tompkins, Harland G.
Formato: Electrónico eBook
Idioma:Inglés
Publicado: Boston : Academic Press, �1993.
Temas:
Acceso en línea:Texto completo
Descripción
Sumario:This book is specifically designed for the user who wishes expanded use of ellipsometry beyond the relatively limited number of turn-key applications. The book provides a concise discussion of theory and instrumentation before describing how to use optical parameters to determine material properties and optical parameters for inaccessible substrates and unknown films, and how to measure extremely thin films. The book also addresses polysilicon, a material commonly used in the microelectronics industry, and the effect of substrate roughness. This book's concepts and applications are reinforced through the 14 case studies that illustrate specific applications of ellipsometry from the semiconductor industry as well as studies involving corrosion and oxide growth. Key Features * Allows the user to optimize turn-key operation of ellipsometers and move beyond limited turn-key applications * Provides comprehensive discussion of the measurement of film thickness and optical constants in film * Discusses the trajectories of the ellipsometric parameters Del and Psi and how changes in the materials affect the parameters * Includes 14 case studies to reinforce specific applications * Includes three appendices for helpful references.
Descripción Física:1 online resource (xv, 260 pages) : illustrations
Bibliografía:Includes bibliographical references and index.
ISBN:1299195350
9781299195356
0323140009
9780323140003