Developments in surface contamination and cleaning /
Rajiv Kohli and Kash Mittal have brought together the work of experts from different industry sectors and backgrounds to provide a state-of-the-art survey and best practice guidance for scientists and engineers engaged in surface cleaning or handling the consequences of surface contamination. Topics...
Clasificación: | Libro Electrónico |
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Otros Autores: | , |
Formato: | Electrónico eBook |
Idioma: | Inglés |
Publicado: |
Norwich, NY, U.S.A. :
W. Andrew Pub.,
�2008-
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Temas: | |
Acceso en línea: | Texto completo |
Tabla de Contenidos:
- Particle Deposition onto Enclosure Surfaces; Contamination Control: A Systems Approach; Particles in Semiconductor Processing; Continuous Contamination Monitoring Systems; Strippable Coatings for Removal of Surface Contaminants; Ultrasonic Cleaning.
- [v. 1.] Fundamentals and applied aspects
- v. 2. Particle deposition, control and removal.