Plasma deposition, treatment, and etching of polymers /

Plasma Deposition, Treatment, and Etching of Polymers takes a broad look at the basic principles, the chemical processes, and the diagnostic procedures in the interaction of plasmas with polymer surfaces. This recent technology has yielded a large class of new materials offering many applications, i...

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Detalles Bibliográficos
Clasificación:Libro Electrónico
Otros Autores: D'Agostino, Riccardo
Formato: Electrónico eBook
Idioma:Inglés
Publicado: Boston : Academic Press, �1990.
Colección:Plasma--materials interactions.
Temas:
Polymers.
Plasma engineering.
Plasma etching.
Plasma polymerization.
Polymers
Polym�eres.
Technique des plasmas.
Gravure par plasma.
Polym�erisation sous plasma.
polymers.
TECHNOLOGY & ENGINEERING > Chemical & Biochemical.
Plasma engineering
Plasma etching
Plasma polymerization
Plasmatechnik
Plasma�atzen
Polymere
Acceso en línea:Texto completo
Tabla de Contenidos:
  • Front Covver; Plasma Deposition, Treatment, and Etching of Polymers; Copyright Page; Table of Contents; Contributors; Preface; Chapter 1. An Introduction to Plasma Polymerization; I. Introduction; II. Control of Plasma Polymer Thin Film Properties; III. Methods of Plasma Polymer Characterization; IV. Applications of Plasma Polymer Films; References; Chapter 2. Plasma Polymerization of Fluorocarbons; I. Comparison of Gas Feeds; II. Simplifying Parameters; III. Reactors; IV. Gas Phase Diagnostics; V. Mechanism of Deposition of PPFM Films
  • VI. Chemical Structure of PPFM Films and Their Correlation to Gas Phase Species DistributionReferences; Chapter 3. Plasma-Polymerized Organosilieones and Organometallics; I. Introduction; II. Effect of Fabrication Variables; III. Plasma Polymerization Mechanisms; IV. The Structure of Plasma Polymer Films; V. Morphology of Plasma Polymer Films; VI. Properties of Plasma Polymer Films; VII. Applications of Plasma Polymer Films; VIII. Conclusions; IX. Addendum; Acknowledgments; References; Chapter 4. Plasma Polymer-Metal Composite Films; I. Introduction
  • II. Vacuum Techniques for Deposition of Polymer/Metal Composite FilmsIII. Elementary Processes Involved in the Deposition; IV. Structure and Composition of Films; V. Optical Properties; VI. Electrical Properties; VII. Mechanical Properties; VIII. Aging Effects and Stability of the Films; IX. Applications; X. Conclusions; Acknowledgments; References; Chapter 5. Plasma Etching of Organic Polymers; I. Introduction; II. Plasma Sources and Diagnostics; III. Hydrocarbon Polymer Etching Using Oxygen Plasmas; IV. Hydrocarbon Polymer Etching in Plasmas of Oxygen and Fluorine Containing Gases
  • v. Fluoropolymer EtchingVI. Effect of Ion Bombardment; VII. Loading Effect; VIII. Temperature Dependence; IX. Other Gases Added to O 2; X. Etch Products; XI. More on Polymer Structure; XII. Applications; Acknowledgments; References; Chapter 6. Applications of Plasma Polymers; I. Introduction; II. Plasma Polymerized Resists in Microfabrication Processes; III. Plasma Polymers in Electronic Elements; IV. Plasma Polymers in Optical Applications; V. Diamond and Amorphous Carbon Synthesis; References; Chapter 7. Plasma Deposition and Treatment for Biomaterial Applications; I. Introduction
  • II. Blood Compatibility of Plasma-Deposited FilmsIII. Ophthalmological Applications; IV. Tissue Culture Applications; V. Membranes and Drug Delivery Devices; VI. Plasma Cleaning of Biomaterial Surfaces; VII. Plasma Sterilization; VIII. Biomedical Electrodes and Implanted Sensors; IX. Conclusions; Acknowledgments; References; Index

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