Ion implantation and beam processing /
Ion Implantation and Beam Processing covers the scientific and technological advances in the fields of ion implantation and beam processing. The book discusses the amorphization and crystallization of semiconductors; the application of the Boltzmann transport equation to ion implantation in semicond...
Clasificación: | Libro Electrónico |
---|---|
Otros Autores: | Williams, James S. (James Stanislaus), 1948-, Poate, J. M. |
Formato: | Electrónico eBook |
Idioma: | Inglés |
Publicado: |
Sydney ; New York :
Academic Press,
1984.
|
Temas: | |
Acceso en línea: | Texto completo |
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