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Solid state chemical sensors /
Solid State Chemical Sensors reviews the basic chemical and physical principles involved in the construction and operation of solid state sensors. A major portion of the book is devoted to explanation of the basic mechanism of operation and the many actual and potential applications of field effect...
| Clasificación: | Libro Electrónico |
|---|---|
| Otros Autores: | , |
| Formato: | Electrónico eBook |
| Idioma: | Inglés |
| Publicado: |
Orlando, Fla. :
Academic Press,
1985.
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| Temas: | |
| Acceso en línea: | Texto completo |
Tabla de Contenidos:
- Chapter 1. Gas-Sensitive Metal Gate Semiconductor Devices
- I. Introduction
- II. MOS Device Physics
- III. Palladium Gate MOS Devices
- IV. Schottky Barrier Devices
- V. Properties of the Catalytic Metal
- VI. The Si-SiO2 System, Properties of Relevance to Gas Sensors
- VII. Applications
- VIII. Conclusions
- Chapter 2. Chemically Sensitive Field Effect Transistors
- I. General Theory
- II. Thermodynamics of ISFETs
- III. Dynamic Characteristics
- IV. Measuring Systems
- V. Special CHEMFETs
- VI. Conclusions
- Chapter 3. Fabrication of Solid State Chemical Sensors
- I. Introduction
- II. General Fabrication Procedure
- III. Some Particulars of CHEMFET Design and Fabrication
- IV. Encapsulation
- Chapter 4. An Introduction to Piezoelectric and Pyroelectric Chemical Sensors
- I. Introduction
- II. Piezoelectric and Pyroelectric Sensors.