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Thin film processes /
Remarkable advances have been made in recent years in the science and technology of thin film processes for deposition and etching. It is the purpose of this book to bring together tutorial reviews of selected filmdeposition and etching processes from a process viewpoint. Emphasis is placed on the p...
| Clasificación: | Libro Electrónico |
|---|---|
| Otros Autores: | , |
| Formato: | Electrónico eBook |
| Idioma: | Inglés |
| Publicado: |
New York :
Academic Press,
1978.
|
| Temas: | |
| Acceso en línea: | Texto completo |
MARC
| LEADER | 00000cam a2200000 i 4500 | ||
|---|---|---|---|
| 001 | SCIDIR_ocn567791296 | ||
| 003 | OCoLC | ||
| 005 | 20231117032946.0 | ||
| 006 | m o d | ||
| 007 | cr bn||||||abp | ||
| 007 | cr bn||||||ada | ||
| 008 | 100323s1978 nyua ob 001 0 eng d | ||
| 040 | |a OCLCE |b eng |e pn |c OCLCE |d OCLCQ |d OPELS |d E7B |d OCLCQ |d IDEBK |d OCLCF |d OCLCQ |d UIU |d OCLCQ |d LEAUB |d OCLCQ |d OCLCO |d OCLCQ |d OCLCO | ||
| 019 | |a 300754417 |a 755235857 | ||
| 020 | |z 0127282505 | ||
| 020 | |z 9780127282503 | ||
| 035 | |a (OCoLC)567791296 |z (OCoLC)300754417 |z (OCoLC)755235857 | ||
| 042 | |a dlr | ||
| 050 | 4 | |a TK7871.15.F5 |b T43 | |
| 082 | 0 | 4 | |a 621.381/73 |
| 082 | 0 | 4 | |a 621.381/71 |2 18 |
| 245 | 0 | 0 | |a Thin film processes / |c edited by John L. Vossen, Werner Kern. |
| 260 | |a New York : |b Academic Press, |c 1978. | ||
| 300 | |a 1 online resource (xi, 564 pages) : |b illustrations | ||
| 336 | |a text |b txt |2 rdacontent | ||
| 337 | |a computer |b c |2 rdamedia | ||
| 338 | |a online resource |b cr |2 rdacarrier | ||
| 504 | |a Includes bibliographical references and index. | ||
| 506 | |3 Use copy |f Restrictions unspecified |2 star |5 MiAaHDL | ||
| 533 | |a Electronic reproduction. |b [Place of publication not identified] : |c HathiTrust Digital Library, |d 2010. |5 MiAaHDL | ||
| 538 | |a Master and use copy. Digital master created according to Benchmark for Faithful Digital Reproductions of Monographs and Serials, Version 1. Digital Library Federation, December 2002. |u http://purl.oclc.org/DLF/benchrepro0212 |5 MiAaHDL | ||
| 583 | 1 | |a digitized |c 2010 |h HathiTrust Digital Library |l committed to preserve |2 pda |5 MiAaHDL | |
| 520 | |a Remarkable advances have been made in recent years in the science and technology of thin film processes for deposition and etching. It is the purpose of this book to bring together tutorial reviews of selected filmdeposition and etching processes from a process viewpoint. Emphasis is placed on the practical use of the processes to provide working guidelines for their implementation, a guide to the literature, and an overview of each process. | ||
| 588 | 0 | |a Print version record. | |
| 650 | 0 | |a Thin films. | |
| 650 | 6 | |a Couches minces. |0 (CaQQLa)201-0035883 | |
| 650 | 7 | |a Thin films |2 fast |0 (OCoLC)fst01150018 | |
| 653 | 0 | |a Thin films | |
| 700 | 1 | |a Vossen, John L. | |
| 700 | 1 | |a Kern, Werner, |d 1925- | |
| 776 | 0 | 8 | |i Print version: |t Thin film processes. |d New York : Academic Press, 1978 |w (DLC) 78003348 |w (OCoLC)4056878 |
| 856 | 4 | 0 | |u https://sciencedirect.uam.elogim.com/science/book/9780127282503 |z Texto completo |