Vacuum technology and applications /
Clasificación: | Libro Electrónico |
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Autor principal: | |
Formato: | Electrónico eBook |
Idioma: | Inglés |
Publicado: |
Oxford ; Boston :
Butterworth-Heinemann,
1991.
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Temas: | |
Acceso en línea: | Texto completo |
Tabla de Contenidos:
- Front Cover
- Vacuum Technology and Applications
- Copyright Page
- Table of Contents
- Preface
- Acknowledgments
- Chapter 1. Introduction
- 1.1 General
- 1.2 The gaseous state
- 1.3 Gas flow
- 1.4 Vacuum system characteristics
- References
- Chapter 2. Vacuum pumps (rough�a�?medium range)
- 2.1 General introduction
- 2.2 Rotary pumps
- 2.3 Roots vacuum pumps
- 2.4 Dry vacuum pumps
- References
- Chapter 3. Vacuum pumps (high�a�?ultra-high range)
- 3�A�1 General introduction
- 3.2 Gas transfer pumps
- 3.3 Entrapment pumps
- 7.2 Vacuum technology in the semiconductor industry7.3 Vacuum technology in metallurgical processes
- 7.4 Vacuum technology in the chemical industry
- References
- Chapter 8. Appendix: units, conversion factors and other data
- 8.1 Units of pressure
- 8.2 Amount of substance
- 8.3 PNEUROP specifications for the characterization of vacuum pumps
- Index