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Chemical mechanical polishing in silicon processing /
Since its inception in 1966, the series of numbered volumes known as Semiconductors and Semimetals has distinguished itself through the careful selection of well-known authors, editors, and contributors. The Willardson and Beer series, as it is widely known, has succeeded in producing numerous landm...
| Clasificación: | Libro Electrónico |
|---|---|
| Otros Autores: | , |
| Formato: | Electrónico eBook |
| Idioma: | Inglés |
| Publicado: |
San Diego, CA :
Academic Press,
�2000.
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| Colección: | Semiconductors and semimetals ;
v. 63. |
| Temas: | |
| Acceso en línea: | Texto completo Texto completo |