Comprehensive microsystems /

Provides an overview of the wide range of topics which comprise the microsystems field, including, design and materials, fabrication and packaging, optical systems, chemical and biological systems, physical sensors, actuation, electronics for MEMS and industrial applications.

Detalles Bibliográficos
Clasificación:Libro Electrónico
Otros Autores: Gianchandani, Yogesh B., Tabata, Osamu, 1956-, Zappe, Hans P.
Formato: Electrónico eBook
Idioma:Inglés
Publicado: Amsterdam ; Oxford : Elsevier, �2008.
Temas:
Microelectromechanical systems.
Micro-Electrical-Mechanical Systems
Microsyst�emes �electrom�ecaniques.
Electrical & Computer Engineering.
Electrical Engineering.
Engineering & Applied Sciences.
Acceso en línea:Texto completo
Descripción
Sumario:Provides an overview of the wide range of topics which comprise the microsystems field, including, design and materials, fabrication and packaging, optical systems, chemical and biological systems, physical sensors, actuation, electronics for MEMS and industrial applications.
Descripción Física:1 online resource (3 volumes) : illustrations (some color)
Bibliografía:Includes bibliographical references and index.
ISBN:9780444521903
0444521909

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