Materials science in microelectronics /
The subject matter of thin-films which play a key role in microelectronics divides naturally into two headings: the processing / structure relationship, and the structure / properties relationship. Part II of 'Materials Science in Microelectronics' focuses on the latter of these relationsh...
Clasificación: | Libro Electrónico |
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Autor principal: | |
Formato: | Electrónico eBook |
Idioma: | Inglés |
Publicado: |
Amsterdam ; Boston :
Elsevier,
2005-
|
Edición: | 2nd ed. |
Temas: | |
Acceso en línea: | Texto completo Texto completo |
MARC
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050 | 4 | |a TK7871.15.F5 |b M32 2005eb | |
082 | 0 | 4 | |a 612.38152 |2 22 |
100 | 1 | |a Machlin, E. S. | |
245 | 1 | 0 | |a Materials science in microelectronics / |c E.S. Machlin. |
250 | |a 2nd ed. | ||
260 | |a Amsterdam ; |a Boston : |b Elsevier, |c 2005- | ||
300 | |a 1 online resource (volumes <1>) | ||
336 | |a text |b txt |2 rdacontent | ||
337 | |a computer |b c |2 rdamedia | ||
338 | |a online resource |b cr |2 rdacarrier | ||
520 | |a The subject matter of thin-films which play a key role in microelectronics divides naturally into two headings: the processing / structure relationship, and the structure / properties relationship. Part II of 'Materials Science in Microelectronics' focuses on the latter of these relationships, examining the effect of structure on the following: Electrical properties Magnetic properties Optical properties Mechanical properties Mass transport properties Interface and junction properties Defects and properties * Captures the importance of thin films to microelectronic development * Examines the cause / effect relationship of structure on thin film properties. | ||
504 | |a Includes bibliographical references and indexes. | ||
505 | 0 | |a v. 1. The relationships between thin film processing and structure -- v. 2. The effects of structure on properties in thin films. | |
588 | 0 | |a Print version record. | |
650 | 0 | |a Thin films. | |
650 | 0 | |a Microelectronics. | |
650 | 2 | |a Miniaturization |0 (DNLM)D008904 | |
650 | 6 | |a Couches minces. |0 (CaQQLa)201-0035883 | |
650 | 6 | |a Micro�electronique. |0 (CaQQLa)201-0035977 | |
650 | 7 | |a microelectronics. |2 aat |0 (CStmoGRI)aat300253974 | |
650 | 7 | |a Microelectronics |2 fast |0 (OCoLC)fst01019757 | |
650 | 7 | |a Thin films |2 fast |0 (OCoLC)fst01150018 | |
776 | 0 | 8 | |i Print version: |a Machlin, E.S. |t Materials science in microelectronics. |b 2nd ed. |d Amsterdam ; Boston : Elsevier, 2005- |z 008044640X |z 9780080446400 |w (DLC) 2005934958 |w (OCoLC)63692543 |
856 | 4 | 0 | |u https://sciencedirect.uam.elogim.com/science/book/9780080446394 |z Texto completo |
856 | 4 | 0 | |u https://sciencedirect.uam.elogim.com/science/book/9780080446400 |z Texto completo |